학술논문

Deposition of garnet thin films by metallo-organic decomposition (MOD)
Document Type
Periodical
Source
IEEE Transactions on Magnetics IEEE Trans. Magn. Magnetics, IEEE Transactions on. 30(6):4416-4418 Nov, 1994
Subject
Fields, Waves and Electromagnetics
Garnet films
Glass
Bismuth
Optical films
Dielectric substrates
Amorphous magnetic materials
Sputtering
Solvents
Atomic measurements
Data storage systems
Language
ISSN
0018-9464
1941-0069
Abstract
Polycrystalline Dy/sub 1.6/Bi/sub 1.4/Fe/sub (5-x)/FeGa/sub x/O/sub 12/ and Gd/sub 2/BiFe/sub (5-x)/Ga/sub x/O/sub 12/ garnet thin films have been deposited on glass substrates by metallo-organic decomposition. The advantages of this process include low cost and accurate control of composition. The crystalline garnet phase was ascertained by X-ray diffractometry and the composition was measured by X-ray flourescence. The magnetic and magneto-optic properties were characterized using a magneto-optic loop tracer.ETX