학술논문

RF Characterization of Vertical InAs Nanowire Wrap-Gate Transistors Integrated on Si Substrates
Document Type
Periodical
Source
IEEE Transactions on Microwave Theory and Techniques IEEE Trans. Microwave Theory Techn. Microwave Theory and Techniques, IEEE Transactions on. 59(10):2733-2738 Oct, 2011
Subject
Fields, Waves and Electromagnetics
Transistors
Logic gates
Substrates
Radio frequency
Silicon
Arrays
Nanoscale devices
+%24k%24<%2Ftex><%2Fformula>%22">High- $k$
InAs
MOSFET
nanowire
RF
Language
ISSN
0018-9480
1557-9670
Abstract
We present dc and RF characterization of InAs nanowire field-effect transistors (FETs) heterogeneously integrated on Si substrates in a geometry suitable for circuit applications. The FET consists of an array of 182 vertical InAs nanowires with about 6-nm HfO$_{2}$ high-$k$ gate dielectric and a wrap-gate length of 250 nm. The transistor has a transconductance of 155 mS/mm and an on-current of 550 mA/mm at a gate voltage of 1.5 V and a drain voltage of 1 V. $S$-parameter measurements yield an extrinsic cutoff frequency of 9.3 GHz and a extrinsic maximum oscillation frequency of 14.3 GHz.