학술논문
Generation of micro-domains in AT-cut quartz by thermal processing and the effect on resonator modes
Document Type
Conference
Source
Proceedings of IEEE 48th Annual Symposium on Frequency Control Frequency control Frequency Control Symposium, 1994. 48th., Proceedings of the 1994 IEEE International. :122-126 1994
Subject
Language
Abstract
The fabrication of acoustic sensors with sol-gel selective coatings requires the deposition of thin films on quartz resonators using solution chemistry techniques. Oxide films are spin-cast, then heat treated. A variety of film compositions are deposited, requiring a variety of firing schedules. Network analysis of the untreated AT-cut quartz devices revealed a resonant frequency of 5.0 MHz, corresponding to a pure thickness-shear mode resonance. For devices that were rapidly fired to 400/spl deg/C and rapidly air cooled, network analysis showed the shear-mode response at 5.0 MHz disappeared, while a predominantly compressional mode response at 7.3 MHz emerged. Structural analysis explored the crystal structure changes induced by processing which resulted in this new mode.ETX