학술논문

A simultaneous multimodal sensor for proton and light sensing using a Hole and Electron Accumulation Technique
Document Type
Conference
Source
2011 IEEE SENSORS Proceedings Sensors, 2011 IEEE. :932-935 Oct, 2011
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
General Topics for Engineers
Robotics and Control Systems
Optical sensors
Heating
Optical imaging
Charge carrier processes
Capacitance
Electric potential
Language
ISSN
1930-0395
Abstract
A novel CMOS (complementary metal-oxide semiconductor)-based multimodal biosensor is devised. In the devised sensor, both electrons and holes are handled simultaneously as a signal electrical charge. We named this technique the ‘Hole and Electron Accumulation Technique (HEAT)’. Using the HEAT sensor, two phenomena (e. g. ion concentration and light power) are mapped perfectly simultaneously by the same pixel. In this paper, the sensing mechanism and the basic characteristics of the HEAT sensor are described. As a result, we successfully demonstrated a multimodal sensor for the simultaneous sensing of pH (power of hydrogen: proton concentration) and light power.