학술논문
Prototype double-sided silicon sensor (DSSS) for SDC detector
Document Type
Conference
Author
Source
IEEE Conference on Nuclear Science Symposium and Medical Imaging Nuclear Science Symposium and Medical Imaging Conference, 1992., Conference Record of the 1992 IEEE. :219-221 vol.1 1992
Subject
Language
Abstract
A full-size, double-sided, AC coupling sensor for the SDC central tracker was fabricated. The bias feeding resistor for each strip on both surfaces was implemented by a poly-Si line. The resistance was well controlled within a design value which is good enough to feed uniform bias to each strip. The ohmic-contact strip isolation was attained by inserting a p/sup +/ channel between n/sup +/ strips. The readout capacitance was minimized by making a narrow strip on the p/sup +/ side and by inserting a wide isolation p/sup +/ channel in the n/sup +/ strip side. The capacitance is measured to be 0.8 pF/cm on the p/sup +/ strip side and 1.13 pF/cm on the n/sup +/ strip side. The junction edge breakdown voltage has been pushed up to more than 150 V by an Al strip narrower than the implanted strip width.ETX