학술논문
Bulk nanocrystalline graphite thin films for piezorezistive sensing applications
Document Type
Conference
Author
Source
2019 International Semiconductor Conference (CAS) Semiconductor Conference (CAS), 2019 International. :229-232 Oct, 2019
Subject
Language
ISSN
2377-0678
Abstract
Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. Several thin films have been grown by PECVD and investigated through various techniques: Raman spectroscopy, electrical characterization, AFM, profilometry and spectroscopic ellipsometry. After a careful analysis of our findings we have weighted the use of the material as a piezoresistive sensor and made a goal for future research.