학술논문

Comparative study of the radiation hardness of an analog CMOS pipeline, discrete MOS transistors and interface traps in MOS capacitors
Document Type
Conference
Source
Proceedings of the Third European Conference on Radiation and its Effects on Components and Systems Radiation and its effects on components and systems Radiation and its Effects on Components and Systems, 1995. RADECS 95., Third European Conference on. :50-56 1995
Subject
Fields, Waves and Electromagnetics
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Nuclear Engineering
Pipelines
Degradation
MOS capacitors
Threshold voltage
Manufacturing processes
CMOS process
Circuits
Density measurement
Silicon
Photonic band gap
Language
Abstract
The ZEUS experiment at HERA employs a custom made analog pipeline, manufactured with a 2 /spl mu/m CMOS process. The standard transistor layout was not sufficiently radiation hard. After introducing thin oxide extension and guard bands, the pipeline worked after irradiation, up to 500 krad, with only minor performance degradation. The performance of the pipeline and of discrete transistors was studied before and after irradiation. Additionally, interface traps were investigated on MOS capacitors. All devices were made with the same process. The degradation of transistor parameters was related to changes in the parameters of the pipeline. Most effects in the circuit could be explained by the observed threshold voltage shift in the transistors. Interface trap densities were measured on MOS capacitors in the lower part of the silicon bandgap, obtained under different bias conditions during irradiation. The observed interface trap density is low. The threshold voltage shift is dominated by fixed oxide charges.