학술논문
Ultraviolet-sensitive AlGaN-based surface acoustic wave devices
Document Type
Conference
Author
Source
Proceedings of IEEE Sensors, 2004. IEEE sensors 2004 Sensors, 2004. Proceedings of IEEE. :1345-1348 vol.3 2004
Subject
Language
Abstract
Two types of novel ultraviolet-sensitive III-nitride based surface acoustic wave devices are presented. We demonstrate the Al/sub x/Ga/sub l-x/N-based surface acoustic wave delay-line oscillator, which is applied as an ultraviolet sensor capable of solar-blind operation with remote wireless pickup of the output signal. Also, we report on the SAW-induced high-frequency resistance modulation effect, which is dramatically increased under ultraviolet illumination.