학술논문

InGaAs inversion layers band structure, electrostatics, and mobility modeling based on 8 Band k · p theory
Document Type
Conference
Source
2014 44th European Solid State Device Research Conference (ESSDERC) Solid State Device Research Conference (ESSDERC), 2014 44th European. :114-117 Sep, 2014
Subject
Bioengineering
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Power, Energy and Industry Applications
Indium gallium arsenide
Indium phosphide
Couplings
Scattering
Phonons
MOS devices
Logic gates
Language
ISSN
1930-8876
2378-6558
Abstract
8 band k · p method is used to calculate subband structures of InGaAs inversion layers accounting for strong coupling between conduction and valence bands around Γ point as well as quantum confinement. Inversion layer mobility is computed employing Kubo-Greenwood formalism. Scatterings due to acoustic phonons, polar optical phonons, ionized impurities, interface fixed charges, surface roughness, and alloy disorder are included. The simulated low-field electron mobility results are in good agreement with in-house experimental data with and without an InP capping layer.