학술논문
Implementation of a TCAD based system to aid process transfer
Document Type
Conference
Author
Source
1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) Statistical metrology Statistical Metrology, 1999. IWSM. 1999 4th International Workshop on. :54-57 1999
Subject
Language
Abstract
This paper describes a methodology for using TCAD as an aid to process transfer. The methodology is based on the use of a semi-automated system developed to reduce the effort required by the user in developing the TCAD code, thereby reducing the time taken to implement a process transfer. The issues involved in process transfer are considered, as is the role that TCAD can play in the procedure. The operation of the system is outlined and an example of its application is used to indicate its potential.