학술논문
Wafer-level fabrication of vacuum-gap Fabry-Pérot resonators with quality factors exceeding one billion
Document Type
Conference
Author
Source
2024 Optical Fiber Communications Conference and Exhibition (OFC) Optical Fiber Communications Conference and Exhibition (OFC), 2024. :1-3 Mar, 2024
Subject
Language
Abstract
We present a wafer-level fabrication method for high-Q, compact vacuum-gap Fabry-Pérot resonators. With quality factors surpassing one billion at 1560 nm, these resonators are well-suited in a range of applications as frequency references.