학술논문

Patterning of metal electrode on flexible substrate using laser transfer method
Document Type
Conference
Source
CLEO/QELS: 2010 Laser Science to Photonic Applications Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on. :1-2 May, 2010
Subject
Components, Circuits, Devices and Systems
Photonics and Electrooptics
Communication, Networking and Broadcast Technologies
Fields, Waves and Electromagnetics
Signal Processing and Analysis
Engineered Materials, Dielectrics and Plasmas
Power, Energy and Industry Applications
Electrodes
Substrates
Conductive films
Printing
Transistors
Aluminum
Positron emission tomography
Conductivity
Adhesives
Testing
Language
Abstract
Through incorporating with the technique of rapid polydimethysiloxane (PDMS) lift-off, this study reports on a new laser transfer method that is applicable to printing metallic thin film on a flexible substrate. Aluminum line patterns, with line widths of 40 and 100 µm and deposited on poly(ethylene terephthalate) (PET) substrate, are presented. The patterned film is demonstrated to be a good conductor, with resistivity of 2.95×10 −6 Ω-cm, and with very good adhesion strength through the scotch-tape test.