학술논문

BAW Filter for space applications at 4.2 GHz
Document Type
Conference
Source
2022 52nd European Microwave Conference (EuMC) Microwave Conference (EuMC), 2022 52nd European. :416-419 Sep, 2022
Subject
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Silicon compounds
Q-factor
Satellites
C-band
Resonator filters
Tungsten
Bandwidth
Filter
bulk acoustic resonators
solidly mounted resonators
satellite communication
Language
Abstract
This paper presents a C-band Bulk Acoustic Wave (BAW) filter for space applications. The Solidly Mounted Resonators (SMR) of the filter are based on an Aluminum Nitride (AIN) technology above a Bragg mirror composed of tungsten (W) and silicon dioxide (SiO2). The resonators used to design the filter have a 5.4% electromechanical coupling coefficient at ≈4.2 GHz and their quality factor at the anti-resonance is close to 700. The filter is centered at 4.2 GHz, it has an 83 MHz bandwidth and the minimum insertion loss in the bandwidth is 3.2 dB. Its volume, smaller than 1 mm 3 , and its mass, less than 1 gram, are drastically reduced compared to technologies commonly used on-board satellites.