학술논문

Prediction algorithm to control the temperature inside a laboratory furnace used for semiconductor devices characterization
Document Type
Conference
Source
2017 International Semiconductor Conference (CAS) Semiconductor Conference (CAS), 2017 International. :257-260 Oct, 2017
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Furnaces
Temperature measurement
Mathematical model
Heating systems
Temperature
Resistors
Silicon carbide
Furnace
Temperature control
Thermal analysis
Semiconductor
Language
Abstract
In this paper are described some principles and new methods underlying the temperature adjustment in an laboratory electrical furnace. Due to high thermal inertia, classical Proportional-Integral-Derivative algorithms are difficult to be implemented when a high precision temperature adjustment is required. An original software algorithm written in C language performs the temperature control function, by conducting screenings for temperature values in the next future. Thus, the furnace temperature may be set with a high accuracy. The method is practically implemented and tested on a testing platform for wide bandgap semiconductors.