학술논문
Experimentally validated multivariable /spl mu/ feedback controller design for a high-precision wafer stage
Document Type
Conference
Author
Source
Proceedings of the 40th IEEE Conference on Decision and Control (Cat. No.01CH37228) Decision and control Decision and Control, 2001. Proceedings of the 40th IEEE Conference on. 2:1583-1588 vol.2 2001
Subject
Language
Abstract
Conventional PID-like SISO controllers are still common in industrial servo systems, but the ever increasing performance requirements call for advanced MIMO control. This paper presents /spl mu/ feedback controller design for high-precision wafer stage motion. Weighting filters-are proposed to straightforwardly and effectively impose performance and uncertainty specifications. The performance has been experimentally verified and compared with conventional multiloop SISO control.