학술논문

Novel Bi-Layer Poly-Silicon Channel Vertical Flash Cell for Ultrahigh Density 3D SONOS NAND Technology
Document Type
Conference
Source
2011 3rd IEEE International Memory Workshop (IMW) Memory Workshop (IMW), 2011 3rd IEEE International. :1-4 May, 2011
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Junctions
Annealing
Logic gates
Materials
Implants
Computer architecture
Microprocessors
Language
ISSN
2159-483X
2159-4864
Abstract
NA