학술논문

Designing Weakly Coupled Mems Resonators with Machine Learning-Based Method
Document Type
Conference
Source
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) Micro Electro Mechanical Systems Conference (MEMS), 2022 IEEE 35th International Conference on. :454-457 Jan, 2022
Subject
Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Couplings
Micromechanical devices
Sensitivity
Conferences
Supervised learning
Sociology
Space exploration
Weakly Coupled Resonators
Machine Learning
Design Space Exploration
Language
ISSN
2160-1968
Abstract
We demonstrate a design scheme for weakly coupled resonators (WCRs) by integrating the supervised learning (SL) with the genetic algorithm (GA). In this work, three distinctive achievements have been accomplished: 1) the precise prediction of coupling characteristics of WCRs with an accuracy of 98.7% via SL; 2) the stepwise evolutionary optimization of WCR geometries while maintaining their geometric connectivity via GA; and 3) the highly efficient generation of WCR designs with a mean coupling factor down to 0.0056, which outperforms 98% of random designs. The coupling behavior analysis and prediction are validated with experimental data of coupled microcantilevers from a published work. As such, this newly proposed scheme could shed light upon the structural optimization methods for high-performance MEMS devices with high degree of design freedom.