학술논문
Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles
Document Type
Conference
Author
Source
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :485-488 Jan, 2011
Subject
Language
ISSN
1084-6999
Abstract
The single-shot interferometric imaging of normal mode dynamics in MEMS resonators, oscillating in the radio frequency (rf) regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended silicon and graphene thin-film structures, and their extracted equilibrium profiles, are measured through nondestructive all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the modal patterns of a microdrum silicon resonator is analyzed, and its extracted vibration modes and equilibrium profile show good agreement with other characterization and numerical estimations.