학술논문
E-mode AlGaN/GaN True-MOS, with high-k ZrO2 gate insulator
Document Type
Conference
Author
Source
2015 45th European Solid State Device Research Conference (ESSDERC) Solid State Device Research Conference (ESSDERC), 2015 45th European. :60-63 Sep, 2015
Subject
Language
ISSN
1930-8876
2378-6558
2378-6558
Abstract
We report on fabrication of enhancement-mode True-MOS high electron mobility transistor (HEMT) with ZrO 2 gate dielectric. The GaN cap and AlGaN layers in the gate area are completely recessed by dry etching up to the GaN channel layer. The increase in channel resistance subsequent to the recess is compensated by adopting sub-micrometer gates and the negative V th shift is mitigated by using a high-k dielectric. The maximum output current of 0.45 A/mm for a 0.5 μm gate length shows that the above concept can be promising for switching applications.