학술논문

Advances in Microvalve and Micro Pre-concentrator Technology for the Space Atmosphere Monitor Instrument: From Research to the International Space Station

Document Type

Conference

Author

Rais-Zadeh, M.; Bae, B.; Jung-Kubiak, C.; Toda, R.; Homer, M.; Coskun, B.; Fisher, A.; Shevade, A.; Rahiminejad, S.; Frez, C.; Gill, J.; Dickie, M.; Malone, C.; Fu, D.; Madzunkov, S.; Darrach, M.

Source

2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2024 8th IEEE. :1-3 Mar, 2024

Subject

Bioengineering
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Space vehicles
Micromechanical devices
Microelectromechanical systems
Instruments
Space technology
Atmospheric modeling
Aerospace electronics
International Space Station (ISS)
mass spectrometer (MS)
MEMS
microvalve
space instrument

Language

Abstract

This paper delves into the iterative evolution of microelectromechanical system (MEMS) Microvalve (MV) and pre-concentrator (PC) generations designed for the Spacecraft Atmosphere Monitor (S.A.M.) instrument, a critical component of the International Space Station’s (ISS) air quality monitoring system. Covering design, simulation, and characterization, this paper includes the latest generation of PC and MV that meets and exceeds all key performance requirements of S.A.M. Deployed on the ISS in 2023, MV XXI exemplifies ongoing advancements in MV technology for space applications.

Online Access

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