학술논문
Problems of application of X-ray standing wave technique (XSW) to the study of implanted crystals
Document Type
Conference
Author
Source
RADECS 91 First European Conference on Radiation and its Effects on Devices and Systems Radiation and its Effects on Devices and Systems, 1991. RADECS 91., First European Conference on. :544-547 1991
Subject
Language
Abstract
The aim of the authors' work is to discuss some problems of application of the XSW technique to study monocrystalline materials implanted with heavy ions and then annealed by high power pulsed laser. The approximation of quasi-perfect lattice seems in this case not quite satisfied because of large radiation damage. Thus, there is a need for a slightly modified approach to the experimental XSW data analysis. As an example of XSW measurements the results on Si