학술논문

InAs/AlSb Quantum Cascade Detectors Strain-Balanced to GaSb Substrates
Document Type
Conference
Source
2023 IEEE Research and Applications of Photonics in Defense Conference (RAPID) Photonics in Defense Conference (RAPID), 2023 IEEE Research and Applications of. :1-2 Sep, 2023
Subject
Photonics and Electrooptics
Surface waves
Superlattices
Detectors
Optical variables measurement
Surface roughness
Rough surfaces
Substrates
quantum cascade detector
InAs/AlSb
GaSb
strain-balancing
mid-infrared
intersubband
photodetector
Language
ISSN
2836-6832
Abstract
We present a study on the growth, design, and characterization of strain-compensated InAs/AlSb quantum cascade detectors (QCDs) on GaSb substrates. A QCD detecting at 4.3 μmwas designed and grown. HR-XRD and AFM confirm high growth quality and successful strain compensation.