학술논문

In-Memory Compute Chips with Carbon-based Projected Phase-Change Memory Devices
Document Type
Conference
Source
2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :1-4 Dec, 2023
Subject
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Nuclear Engineering
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Resistance
Phase change materials
Conductivity
Programming
Phase change memory
Photomicrography
Manganese
Language
ISSN
2156-017X
Abstract
Achieving sufficient compute precision in matrix-vector multiply (MVM) operations is a key challenge for analog in-memory computing (AIMC) that relies on resistive memory devices. A device-level concept that addresses this challenge is that of projected-type phase-change memory (Proj-PCM). Here we present Proj-PCM devices based on carbon-based projection layer (CPL). We integrated these devices onto multi-tile AIMC chips fabricated in 14nm CMOS technology. CPL is shown to exhibit superior compatibility with the phase-change material layer (PCML) as well as the BEOL process. CPL also provides sufficient tunability of resistance window. The compute tiles with CPL-based Proj-PCM are shown to achieve higher computational precision compared to those with standard PCM devices.