학술논문

A 3D Nanoprinted Normally Closed Microfluidic Transistor
Document Type
Conference
Source
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2020 IEEE 33rd International Conference on. :131-134 Jan, 2020
Subject
Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Additive Manufacturing
3D Printing
Direct Laser Writing
Two-Photon Polymerization
Microfluidic Circuit
Language
ISSN
2160-1968
Abstract
Emerging applications in areas such as soft micro-robotics and biofluidic microsystems demand microfluidic circuitry at smaller scales. State-of-the-art additive manufacturing (or colloquially, “three-dimensional (3D) printing”) technologies are uniquely suited to enable such capabilities; however, current 3D printed microfluidic transistors are all based on “normally open” operations (i.e., fluid flow persists until a control pressure is applied to stop the flow). As both p-channel and n-channel transistors offer distinct benefits in varying electronics scenarios, we seek to provide such alternatives for microfluidics. Here we present the first 3D printed “normally closed” microfluidic transistor – fabricated in a $30-\mu \mathrm{m}$-tall channel via two-photon direct laser writing (DLW) – which comprises a “free-floating” sealing element that can be actively displaced to permit source-to-drain fluid flow ($Q_{SD}$). Theoretical and experimental results revealed that the sealing disc effectively blocked $Q_{SD}$ through the 3D microfluidic transistor until a gate pressure ($P_{G}$) of sufficient magnitude led to displacement of the sealing disc, and in turn, unobstructed $Q_{SD}$. These results suggest that the presented normally closed microfluidic transistor – the smallest reported to our knowledge – offers unique promise for fluidic processing applications in diverse chemical, biomedical, and soft robotics fields.