학술논문
Thin film ZnO based bulk acoustic mode filters
Document Type
Conference
Author
Source
1997 IEEE MTT-S International Microwave Symposium Digest Microwave symposium Microwave Symposium Digest, 1997., IEEE MTT-S International. 1:181-184 vol.1 1997
Subject
Language
ISSN
0149-645X
Abstract
We have used thin film ZnO bulk mode resonators on an acoustically reflecting solid glass substrate to produce a variety of filters in the 1-3 GHz frequency bands. Power handling is large (>2W). Overall filter dimensions are very small (/spl sim/1 mm), while lithography requirements are undemanding (>10 /spl mu/m). A range of ladder filters has been produced with an average rejection to insertion loss ratio of /spl sim/10. Monolithic inductors have also been used to improve characteristics over specified bands.