학술논문
Wafer-scale and universal van der Waals metal semiconductor contact
Document Type
article
Author
Source
Nature Communications, Vol 14, Iss 1, Pp 1-8 (2023)
Subject
Language
English
ISSN
2041-1723
Abstract
Laminated van der Waals (vdW) metallic electrodes can improve the contact of 2D electronic devices, but their scalability is usually limited by the transfer process. Here, the authors report a strategy to deposit vdW contacts onto various 2D and 3D semiconductors at the wafer scale.