학술논문
Spatial mapping of photovoltage and light-induced displacement of on-chip coupled piezo/photodiodes by Kelvin probe force microscopy under modulated illumination
Document Type
article
Author
Source
Beilstein Journal of Nanotechnology, Vol 14, Iss 1, Pp 1059-1067 (2023)
Subject
Language
English
ISSN
2190-4286
Abstract
In this work, a silicon photodiode integrated with a piezoelectric membrane is studied by Kelvin probe force microscopy (KPFM) under modulated illumination. Time-dependent KPFM enables simultaneous quantification of the surface photovoltage generated by the photodiode as well as the resulting mechanical oscillation of the piezoelectric membrane with vertical atomic resolution in real-time. This technique offers the opportunity to measure concurrently the optoelectronic and mechanical response of the device at the nanoscale. Furthermore, time-dependent atomic force microscopy (AFM) was employed to spatially map voltage-induced oscillation of various sizes of piezoelectric membranes without the photodiode to investigate their position- and size-dependent displacement.