학술논문
Selective growth of single phase VO2(A, B, and M) polymorph thin films
Document Type
article
Author
Source
APL Materials, Vol 3, Iss 2, Pp 026101-026101-7 (2015)
Subject
Language
English
ISSN
2166-532X
Abstract
We demonstrate the growth of high quality single phase films of VO2(A, B, and M) on SrTiO3 substrate by controlling the vanadium arrival rate (laser frequency) and oxidation of the V atoms. A phase diagram has been developed (oxygen pressure versus laser frequency) for various phases of VO2 and their electronic properties are investigated. VO2(A) phase is insulating VO2(B) phase is semi-metallic, and VO2(M) phase exhibits a metal-insulator transition, corroborated by photo-electron spectroscopic studies. The ability to control the growth of various polymorphs opens up the possibility for novel (hetero)structures promising new device functionalities.