부산대학교 도서관

This contribution introduces a new and advantageous set-up for resistive pressure sensors. Highly sensitive functional layers in combination with the ceramics zirconia enables the invention of a high performance, fail-proof and cost-efficient sensor concept. Membrane and sensor body are based on the ceramic material ZrO2 stabilized with Y2O3 yielding improved mechanical properties. Due to the ceramics inherent electrical insulation and the use of advanced thin film technology a simplified set-up is feasible. The membrane carries a highly sensitive layer that is structured to a Wheatstone bridge just by some laser cuts. Electrical contacts are securely bonded directly onto the sensor layer without the need for contact layers. We further demonstrate a construction and assembling technique of the complete pressure sensor including threat and housing. First results of pressure sensor samples with a nominal capacity of 100 bar are realized and discussed.