학술논문
The synthesis and development of novel group 14 atomic layer deposition precursors and related studies
Document Type
Electronic Thesis or Dissertation
Author
Source
Subject
Language
English
Abstract
The research presented in this thesis sought to identify and investigate novel molecular precursors that could be utilized in the atomic layer deposition (ALD) of M(II) containing thin films of the group 14 metals. Investigations focused on the rational design of novel complexes by building upon known vapour deposition precursors through tailoring of substituent groups in an attempt to identify the subsequent effects upon the chemical and physical properties of the novel molecular precursors.