학술논문

Ultra-thin titanium nitride films for refractory spectral selectivity
Document Type
Working Paper
Source
Optical Materials Express 8, 3717 (2018)
Subject
Physics - Applied Physics
Condensed Matter - Mesoscale and Nanoscale Physics
Language
Abstract
We demonstrate a selectively emitting optical Fabry-P\'erot resonator based on a few-nm-thin continuous metallic titanium nitride film, separated by a dielectric spacer from an optically thick titanium nitride back-reflector, which exhibits excellent stability at 1070 K against chemical degradation, thin-film instabilities and melting point depression. The structure paves the way to the design and fabrication of refractory thermal emitters using the well-established processes known from the field of multilayer and rugate optical filters. We demonstrate that a few-nanometer thick films of titanium nitride can be stable under operation at temperatures exceeding 1070 K. This type of selective emitter provides a means towards near-infrared thermal emission that could potentially be tailored to the accuracy level known from rugate optical filters.
Comment: 16 pages, 6 figures