부산대학교 도서관

Industrial applications of plasma have significantly increased beyond semiconductor manufacturing in recent years. This necessitates training a skilled workforce in plasma science and technology. However, an essential challenge to this end stems from the high cost of plasma devices and diagnostics. The limited access to plasma devices has hindered plasma education, particularly in the least developed countries. To this end, this paper demonstrates how low-cost sensors and circuits can be developed to enable inexpensive plasma experiments in laboratory environments. In particular, we show how to measure high voltage, current, and power from a cold-atmospheric plasma discharge. Additionally, we develop a low-cost illuminance sensor and demonstrate how it can be used to estimate the corresponding plasma power. The low-cost sensors and electronics presented in this paper can aid educators in characterizing plasma power versus plasma illuminance.