학술논문
Self-heating effect in nanoscale SOI Junctionless FinFET with different geometries
Document Type
Working Paper
Source
Subject
Language
Abstract
In this work we study the self-heating (1) effect (SHE) in nanoscale Silicon on Insulator Junctionless (SOI JL) FinFET transistor with fi cross section in rectangular, trapeze and triangle form. The lattice temperature dependence on the channel length as well as on buried oxide thickness is considered. It is shown that for considered transistor structure the lattice temperature in the middle of the channel is lower than at lateral sides, near source and drain. Also, we have found at the same conditions the lattice temperature depends on shape of channel cross section too