학술논문
Temperature-Dependent Resistivity of Alternative Metal Thin Films
Document Type
Working Paper
Source
Applied Physics Letters 117, 043104 (2020)
Subject
Language
Abstract
The temperature coefficients of the resistivity (TCR) of Cu, Ru, Co, Ir, and W thin films have been investigated as a function of film thickness below 10 nm. Ru, Co, and Ir show bulk-like TCR values that are rather independent of the thickness whereas the TCR of Cu increases strongly with decreasing thickness. Thin W films show negative TCR values, which can be linked to high disorder. The results are qualitatively consistent with a temperature-dependent semiclassical thin film resistivity model that takes into account phonon, surface, and grain boundary scattering.
Comment: 11 pages, 4 figures
Comment: 11 pages, 4 figures