부산대학교 도서관

In response to aggressive scaling demands in semiconductor manufacturing and the growing need to apply sustainable practices, this paper presents a holistic sustainability assessment framework for evaluating alternative metals for advanced applications. The framework, consisting of seven sustainability aspects, aims to guide researchers and industry stakeholders towards decisions fostering a more sustainable and secure future for microelectronics. This study applies the framework to assess the sustainability of alternative local interconnect metals. The framework identifies five metals (Ti, Al, Ni, Co, and Mo) with relatively favourable performance in at least six out of nine specific indicators, while others (Pt, Ru, Ir, Rh, and Pd) exhibit poorer sustainability metrics. The study recommends further analyses, suggesting the incorporation of case-specific functional units and the use of normalization and weighting factors for a comprehensive evaluation. Coupled with traditional technological assessments, this framework equips decision-makers with essential tools to broaden criteria for selecting alternative metals, aligning semiconductor manufacturing with broader sustainability objectives.
Comment: 20 pages, 5 Figures, 5 Tables, 12 equations