학술논문
高品質氮化鎵基板之製作方法 / The Manufacture Method of High Quality Gan Substrate
Document Type
Article
Author
劉柏均 / Po-Chun Liu; 蔡政達 / Jenq-Dar Tsay; 趙主立 / Chu-Li Chao; 黃信雄 / Hsin-Hsiung Huang; 紀東煒 / Tung-Wei Chi; 郭義德 / Y. D. Guo; 葉瑞琴 / R. C. Yeh; 郭浩中 / Hao-Chung Kuo
Source
光學工程. Issue 102, p36-50. 15 p.
Subject
Language
繁體中文
Abstract
Recently, the focus of GaN LEDs has been changed from the blue light to the UV light (~400nm). Therefore, the fabrication of high quality GaN substrates is the main issue for making Deep UV LEDs. This study is to develop large high-quality GaN substrate.