부산대학교 도서관

In this study, ZnO nanorods on Cu micro-column were synthesized by electrochemical method, then ZnO nanorods were etched to tubular structure by wet etching technique. ZnO nanorods and nanotubes were formed by using electrochemical method and were deposited on electrodes of the copper micro-columns. The morphology and crystal structure of ZnO nanorods and nanotubes were studied by scanning electron microscopy (SEM) and X-ray diffraction (XRD), the chemical state and binding energy were determined by X-ray photoelectron spectroscopy (XPS), respectively. Then these ZnO nanorods and nanotubes were used for gas sensing. In gas sensing test, the ZnO nanotubes exhibited higher sensing response than ZnO nanorods in both carbon monoxide mixture gases (CO and air) and ethanol mixture gases (ethanol and air), this was due to the ZnO nanotubes have the higher specific surface area than ZnO nanorods, and the special hollow structures of ZnO nanorod provides more active sites for gas molecules to get adsorbed into the surface and promote the sensitivity. The sensitivity showed the rising trend with the increasing temperature from 150℃~300℃; but, over 300℃ and below 400℃, the sensitivity decreased. In the same concentration CO mixture gases (CO and air) and ethanol mixture gases (ethanol and air), the ZnO nanotube showed higher sensing response for ethanol mixing gases.