부산대학교 도서관

Polymer optical waveguides have attracted much attention due to their low cost and high process ability. Therefore, we propose a process which is easy, simple, and suitable for mass production. . This project is to study the process by using different refractive index to fabricate a polymer waveguides along with a lithography-galvanic (LIGA)-like and micro molding process. First, the negative photoresist SU-8 is used to fabricate waveguides pattern on a Si substrate, and the metal Ni–Co electroplating technique was applied to transfer the pattern into the Ni–Co mold. Next, a micro-molding process by using the Micro molding in capillaries process technology is used to pattern on the OG-169, and then at core layer the UV exposure is used for curing at same time, the electric field was applied to induce the change of the refractive index of the UV polymer. Finally, UV polymer waveguides is fabricated. In this study, an optical microscope was used to OM observe experiment process, and then profiles of the devices were observed using scanning electron microscope (SEM).