학술논문
Detection of CO and NO using low power metal oxide sensors
Document Type
Article
Author
Source
Physica Status Solidi (A) - Applications and Materials Science; November 2008, Vol. 205 Issue: 11 p2643-2646, 4p
Subject
Language
ISSN
18626300; 18626319
Abstract
In this work we present the fabrication and characterization of low power SnO2gas sensors based on Porous Silicon microhotplates for the detection of toxic gases, like CO and NO. The response of the SnO2gas sensors was measured for various gas concentrations 100500 ppm. Analysis was performed in isothermal operation mode, by keeping constant the microhotplate temperature and in pulsed temperature mode, by applying voltage pulses to the heater. In both cases, the response of the sensors increased as the temperature and the concentration of the detecting gases increased. Comparison between the two different operation modes, shows that the sensors exhibit higher sensitivity in pulsed temperature mode. In addition, with this technique, a significant reduction of power consumption can be achieved. Moreover, the sensors show significant selectivity in detecting NO, so discrimination between the two gases can be achieved. © 2008 WILEYVCH Verlag GmbH & Co. KGaA, Weinheim