학술논문
Imaging study of phase shift spatial light modulator for digital scanner
Document Type
Article
Author
Burkhardt, Martin; van Lare, Claire; Watanabe, Yoji; Kanaya, Yuho; Okudaira, Yosuke; Kibayashi, Shunsuke; Sakamoto, Toshiaki; Mizuno, Yasushi; Masaki, Kazuo; Owa, Soichi; Koo, Thomas; Lin, Bryant; Tan, Michael; Tseng, David; Sorensen, Conrad; Li, Sujuan; Renwick, Stephen; Hirayanagi, Noriyuki; Yuan, Bausan
Source
Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p129530R-129530R-7, 1165778p
Subject
Language
ISSN
0277786X