학술논문
CNT EUV pellicle tunability and performance in a scanner-like environment
Document Type
Article
Author
Felix, Nelson M.; Lio, Anna; Timmermans, Marina Y.; Pollentier, Ivan; Korytov, Maxim; Nuytten, Thomas; Sergeant, Stefanie; Conard, Thierry; Meersschaut, Johan; Zhang, Yide; Dialameh, Masoud; Alaerts, Wilfried; Jazaeri, Ehsan; Spampinato, Valentina; Franquet, Alexis; Brems, Steven; Huyghebaert, Cedric; Gallagher, Emily E.
Source
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116090Y-116090Y-21, 11492932p
Subject
Language
ISSN
0277786X