학술논문
Monitoring two-coordinate positioning by means of optical spectral coding
Document Type
Article
Source
Journal of Optical Technology; May 2018, Vol. 85 Issue: 5 p255-258, 4p
Subject
Language
ISSN
10709762; 10910786
Abstract
Based on spectral coding of broadband radiation, a technique has been developed that makes it possible to monitor the position of a two-coordinate stage and to control its movement with nanometer accuracy. A distinctive feature of the technique is that it makes it possible to monitor the absolute position of the stage without any preliminary calibration. Such devices may be of interest for high-precision systems where the probe is required to move to a given point of the sample with nanometric accuracy.