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Novel EUV photoresist for sub-7nm node (Conference Presentation)

Document Type

Article

Author

Panning, Eric M.; Goldberg, Kenneth A.; Furukawa, Tsuyoshi; Naruoka, Takehiko; Nakagawa, Hisashi; Miyata, Hiromu; Shiratani, Motohiro; Hori, Masafumi; Dei, Satoshi; Ayothi, Ramakrishnan; Hishiro, Yoshi; Nagai, Tomoki

Source

Proceedings of SPIE; April 2017, Vol. 10143 Issue: 1 p101430X-101430X-1, 912872p

Subject

Language

ISSN

0277786X

Online Access

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