학술논문
Research on Micromechanical Machining Technology of Micro-Flow Sensor
Document Type
Article
Author
Source
Applied Mechanics and Materials; January 2013, Vol. 273 Issue: 1 p555-559, 5p
Subject
Language
ISSN
16609336; 16627482
Abstract
The development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and applications. This paper briefly introduces some basic knowledge of the micro-flow sensor. Then we choose several typical micro-flow sensor and analyses their operating principle, structure, micromechanical machining technology, application and so on.