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Thin-film PZT actuator performance in adjustable x-ray optic segments

Document Type

Article

Author

O'Dell, Stephen L.; Gaskin, Jessica A.; Pareschi, Giovanni; Spiga, Daniele; Buffo, Kenneth; DeRoo, Casey; Reid, Paul; Kradinov, Vladimir; Marquez, Vanessa; Trolier-McKinstry, Susan; Bishop, Nathan; Jackson, Thomas N.; Tran, Quyen; Liang, Hanyuan; Liu, Tianning; Tendulkar, Mohit

Source

Proceedings of SPIE; October 2023, Vol. 12679 Issue: 1 p1267915-1267915-19

Subject

Language

ISSN

0277786X

Online Access

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