부산대학교 도서관

This paper reports on low pressure chemical vapor deposited in-situ boron doped polycrystalline germanium-silicon layers with 70% germanium content. The effect of diborane partial pressure on the properties of the GeSi alloy is investigated. The obtained high boron concentration results in resistivity values less than 1 mΩ-cm. The layers deposited at low partial pressures of B2H6exhibit very low stress down to −3 MPa. With increasing B2H6partial pressure first the stress changes from tensile to compressive, followed by a phase transition from polycrystalline to amorphous. The highly doped, low stress poly-Ge0.7Si0.3layers deposited at 430°C are further applied in high-Qmicroelectromechanical resonators envisaged for above-IC integration with CMOS.