학술논문
RECENT PROGRESS AT IMFM ON EXCIMER LASERS AND THEIR APPLICATIONS
Document Type
Article
Author
Source
Journal de Physique IV - Proceedings; October 1991, Vol. 1 Issue: 1 pC7-575-C7-578, 5757572p
Subject
Language
ISSN
11554339; 17647177
Abstract
Recent progress made at IMFM on excimer lasers and their applications is presented. It mainly concerns high power and pulse rate frequency discharge excimer lasers, high energy E-Beam pumped excimer lasers, new excitation schemes, photolysis excitation of uv-visible lasers by sliding discharges, new vuv sources using ionic excimers and processing or elaboration of materials with excimer lasers.