부산대학교 도서관

This paper presents our work on the design, microfabrication and testing of a bidirectional microactuator. The microactuator is electromagnetically driven and it is fully fabricated by surface micromachining on a single silicon wafer with CMOS compatibility. The microactuator consists of three main parts: a Au microcoil, a NiFe membrane with supported legs and a Co-Pt permanent magnet integrated on the membrane. The microactuator has an overall diameter of 1600 µm and an overall height of 600 µm, including the wafer thickness. Two different membrane designs are presented: double-leg and single-leg designs. A laser Doppler vibrometer is used to test the bidirectional motion of the microactuator. The double-leg design operates at a current in the range of ?0.25 to 0.3 A for a displacement in the range of ?71 to 28.3 µm. The single-leg design operates at a current in the range of ?0.1 to 0.3 A for a displacement in the range of ?108 to 150 µm. The bidirectional microactuator has shown a large displacement/size ratio, up to 35 µm mm?2.