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Spin-on metal-oxide underlayer for EUV patterning

Document Type

Article

Author

Guerrero, Douglas; Amblard, Gilles R.; Li, Zhong; Kampitakis, Viktor; Her, Youngjun; Antonio, Charito; Kudo, Takanori; Mullen, Salem; Muthuswamy, Elayaraja; Polishchuk, Orest; Ware, Adam; Wolfer, Elizabeth; Yang, Dong; Cho, Joon-Yeon; Hishida, Aritaka; Sekito, Takashi

Source

Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p1295713-1295713-8

Subject

Language

ISSN

0277786X

Online Access

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