부산대학교 도서관

The correlation between surface morphology and texture (distribution of crystal orientations) has been analyzed to determine how nitrogen provides a competitive growth advantage for the formation of 〈001〉 texture in diamond films. The film morphologies were measured using TappingMode™atomic force microscopy. Corresponding texture studies were performed using X-ray diffraction with a four-circle goniometer to measure (111), (220) and (400) pole figures. Orientation distributions were generated from the pole figures, from which inverse pole figures were made to quantify how texture was affected by process variables. After 2h of growth, with and without nitrogen, similar textures were observed. With increasing time, nitrogen stimulates the growth of orientations between 〈001〉, 〈114〉, and 〈104〉. Without nitrogen, the majority orientation is 〈101〉 with a secondary component near 〈113〉. Examination of fracture surfaces indicates correlations with the observed texture and morphology changes.